Russell Holmes

Family Medicine
4002 Vista Way
Oceanside, CA 92056

Last Updated: 09/26/2026

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Found 1 publications

Low temperature thermal ALD of a SiNx interfacial diffusion barrier and interface passivation layer on SixGe1- x(001) and SixGe1- x(110).

Low temperature thermal ALD of a SiNx interfacial diffusion barrier and interface passivation layer on SixGe1- x(001) and SixGe1- x(110).

Journal: The Journal of chemical physics
Published: February 10, 2017
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Last Updated: 09/26/2026